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Purification method for off-gas and apparatus for purification of off-gas
Purification method for off-gas and apparatus for purification of off-gas
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机译:废气的净化方法及废气的净化装置
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摘要
The present invention relates to a method and an apparatus for purifying waste gas, and more specifically, to a method and an apparatus for purifying waste gas which can remove hydrogen chloride from the emitted waste gas after operating a polysilicon deposition process by a chemical gaseous phase deposition reaction, and can separate hydrogen of high purity.
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