METHOD FOR MANUFACTURING ZINC OXIDE TARGET AND ZINC OXIDE TARGET BY USING THE SAME

摘要

is the average particle diameter of the present invention more specifically relates to a dry raw material powder, a zinc oxide target uniform relates to zinc oxide is such that the target method and thus produced by the target of zinc oxide dispersed in stages. To this end, the present invention is the gallium oxide powder, deionized water, and a mixture of the first dispersant and wet milled to a first dispersion step of preparing a gallium oxide dispersion, said dispersion of the gallium oxide, zinc oxide powder, and mixed after the second dispersant a second dispersion step of preparing the mixture by wet milling the slurry, adding a binder was added to the mixture slurry, the drying step granulation binder is added to the mixed slurry to the spray making a granular powder, the granular powder into a shaped body and sintering the molding step, and sintering the molded body to manufacture includes a step of producing a sintered body. ;