composite membranes consisted of metallic supporter and metal oxide membrane using metals patterned as prominent planes and depressed planes using lithography and their fabrication method

摘要

The present invention relates to a composite membrane consisting of a metallic support layer and a metal oxide film using metal patterned to have a concave-convex shape by means of lithography. In a method for producing the composite membrane consisting of a metallic support layer and a metal oxide film using metal patterned to have a concave-convex shape by means of lithography, the surface of a metallic material patterned to have a concave-convex shape by means of lithography is anodized and etched so that penetrating holes are formed which penetrate through the concave part of the metallic material. The composite membrane consisting of a metallic support layer and a metal oxide film using metal patterned to have a concave-convex shape by means of lithography of the present invention comprises: a metallic material of which the surface is patterned to have a concave-convex shape by means of lithography; a metal oxide film formed on the surface of the metallic material by anodizing the surface of the metallic material; and penetrating holes formed to penetrate the concave part of the metallic material by anodizing the metallic material. Accordingly, excellent mechanical characteristics imparted to an anodized nanoporous oxide ceramic film facilitate handling and significantly increase resistance against heat and mechanical shocks and resistance against heat expansion during back wash by high temperature or low temperature pulse gas so that the composite membrane can be applied to an actual large-scale device and connectivity with other devices is improved. [Reference numerals] (A1,A2,A3,A4,A5,A6,A7,A8,A9,A10,A11,A12,A13,A14,A15) convex; (B1,B2,B3,B4,B5,B6,B7,B8,B9,B10,B11,B12) concave