Thermal spray powder, method for forming thermal spray coating, and plasma resistant member

摘要

Use powder for the assembly that contains the atomic number of the rare earth element oxides of one of the 60 to 70 is composed by including and sintered particles. The average particle size of the primary particles that make up the assembly and sintered particles is 2 ~ 10 . Crush strength of the assembly and sintered particles is 7 ~ 50 MPa. A plasma -resistant member comprises a sprayed coating provided on the surface of the substrate and the substrate . Spray coating by thermal spraying a powder is used , is preferably formed by plasma spraying . ; thermal spray , plasma corrosion , the oxide of a rare earth element , etching