TECHNIQUES FOR IMPROVING THE PERFORMANCE AND EXTENDING THE LIFETIME OF AN ION SOURCE WITH GAS MIXING

摘要

improve the performance of the ion source (202a) in the gas mixture and the technique is initiated to extend the life . In one exemplary embodiment , the techniques improve the performance of the ion source in the ion implanter and may be realized as a method for extending the service life . The method may comprise introducing a predetermined amount of a dopant gas in the ion source chamber 202 . The dopant gas comprises a dopant species . The method may also include introducing a predetermined amount of the diluent gas in the ion source chamber . Dilution gas may improve the performance of the ion source and the dopant gas is diluted so as to extend the life . The dilution gas may be accompanied by more of the same species and the dopant species .