METHOD OF SIMULATING TREATMENT LINE LAYOUT OF MASK CLEANING SYSTEM AND MASK CLEANING SYSTEM USING SAME

摘要

The present invention relates to a method for simulating a treatment line layout of a mask cleaning system and the mask cleaning system using the same. The mask cleaning system includes a treatment line on which a plurality of treatment baths are serially arranged, two or more moving robots which grip a mask combined with a jig, moves along the treatment line, and successively treats the mask in the treatment bath, and a temporary loading part which temporarily loads the jig between the treatment baths arranged in the treatment line. The method for simulating the treatment line layout of the mask cleaning system includes: a treatment information input step of inputting the information of the treatment bath required for treating the mask; a treatment line dividing step of dividing the treatment line into a plurality of treatment sections to minimize the deviation of section treatment time required for each treatment section by reflecting each time required for treating the mask at each treatment bath by successively treating the mask in the treatment bath in the treatment line, wherein one or more treatment baths are included in the treatment section; and a moving robot arranging step of arranging the moving robot to move the mask in each treatment section. The present invention provides the method for simulating the treatment line layout of the mask cleaning system and the mask cleaning system using the same, capable of performing various treatment processes for various masks using one the mask treatment system and obtaining the layout with the most efficient mask treatment process by minimizing standby time in the mask treatment process via the treatment baths.