APPARATUS OF SIMULATING TREATMENT LINE LAYOUT OF MASK CLEANING SYSTEM

摘要

The present invention relates to a method to simulate a layout of a mask processing system, and a mask processing system using the same. An apparatus to simulate a layout of a mask processing system including a treatment line having a plurality of treatment baths disposed in series, two or more mobile robots grasping a mask coupled to a jig and sequentially treating the mask in the treatment baths while moving along the treatment line, and a temporary repository temporarily accumulating a jig between the treatment baths disposed in the treatment line comprises: an input unit inputting one or more among information of a treatment zone of the treatment line, information of the mobile robot, and recipe information of the treatment baths; and a calculation unit dividing the treatment line into a plurality of treatment zones such that variations of a section process time required in each treatment zone are minimized on the basis of a time for which the mask, which goes through the treatment baths one by one, is treated in each treatment bath in the treatment line in accordance to an input data inputted through the input unit, and disposing the mobile robot controlled in movement in each treatment zone to thus dispose the treatment line. The apparatus to simulate a layout of a mask processing system can perform various treatment processes on various masks using a single mask processing system, and minimize a standby time for each mask to wait during a process of being treated, while passing through the treatment baths, to thus obtain a layout for highly efficient mask treatment process.