RESONANT micromechanical accelerometer

摘要

The invention relates to measuring equipment and can be used in micromechanical sensors of linear accelerations. The problem to be solved by the invention is to increase the accuracy of the resonance of the micromechanical accelerometer. Resonant micromechanical accelerometer comprises a base, a pendulum type inertial mass, the resonator of which one end is connected to the inertial mass of the pendulum-type resilient elements. two identical resonator formed of two resonators electromechanical drive, the supporting board, to which one end secured resonators. Baseplate separately fastened to the base outer side of the inertia mass and connected to the base through three abutment platforms. Between resonators and places fastening the support pads are formed elastically deformable beams. In places resonators fastening inertial mass is formed from a flat elastically compliant member attached to the inertial mass through the elastic console. Electromechanical drive consists of fixed electrodes fixed separately on the base and movable electrodes formed on both sides of both cavities with each cavity.