RESONANT micromechanical accelerometer

摘要

The invention relates to measuring equipment and can be used in micromechanical sensors of linear accelerations. The problem to be solved by the utility model is to increase the accuracy of the resonant micromechanical accelerometer. Resonant micromechanical accelerometer comprises a base, two crystal consisting of two inertial masses pendulum. On each chip formed on the two resonators. In places fixing cavities with pendulums along their transverse axes in the plane of the pendulum through narrow slits are formed. The outer frame is made variable in length section. In the field of elastic coupling elements and the outer frame are formed zigzag bends.