EVAPORATOR FOR VACUUM APPLICATION OF THIN FILMS OF METALS AND SEMICONDUCTORS

摘要

FIELD: metallurgy.;SUBSTANCE: evaporator is made from carbon material with a recess for arrangement of sputtered material in the form of a groove located normally to a gravitational field intensity vector and having the type of a trapezoid in its cross section. A trapezoid base that is lower in relation to the gravitational field is lower than an upper one. With that, an insert in the form of a volumetric element from W or Mo or Ta is arranged in the groove.;EFFECT: increasing gravitational stability of molten metal; reducing sputtering; increasing effective wetting surface; improving a directivity pattern and reducing a non-controlled dispersion angle of sputtered materials.;2 cl, 2 dwg