Movement- and position sensor for controlling external electronic equipment, has multiple laminated plate-like layers with sensory areas, and another layer is provided without sensory area, where semiconductor chip is arranged inside sensor

摘要

The movement- and position sensor has multiple laminated plate-like layers with sensory areas, and another layer is provided without the sensory area. A semiconductor chip (2) is arranged inside the sensor but outside the sensory areas. A sphere is formed as an integrated movable micro-mechanical component and four integrated sensory active areas on the plate surfaces, particularly on the plate surfaces and on the surfaces of the cylindrical holes in the plates. A terminal plate (1) is provided with the ports of the sensor, through which an electronic component is controlled by the sensor.