A method and arrangement for measuring the relative orientation of the movable with respect to each other components of a device and sensor for a coordinate measuring machine

摘要

A method for measuring the relative position of relatively movable components (31, 34a; 31, 35; 36, 34a; 38, 41b) of a device (30), wherein a first component (31; 36; 38) and a second component (34a; 35; 41b) of the device in such a way that are movable relative to each other, with the movement a relative orientation of the first (31; 36; 38) and second (34a; 35; 41b) component, and wherein the method comprises the steps of:• Irradiation of an etalon (1; 12; 14) with an electromagnetic radiation, wherein an angle of incidence, with which the electromagnetic radiation upon the etalon (1; 12; 14) is incident clearly from the relative orientation of the first (31; 36; 38) and second (34a; 35; 41b) component and therefore depends on the electromagnetic radiation in the case of a certain relative alignment of the components (31, 34a; 31, 35; 36, 34a; 38, 41b) with an associated angle of incidence on the etalon (1; 12; 14) is incident,• Measuring the proportion of the transmitted to the etalon (1; 12; 14) incident electromagnetic radiation, or measuring the radiation intensity of the penetrating portion of the incident electromagnetic radiation, and outputting a corresponding measurement result,• Determining the relative orientation of the measurement result,wherein an etalon (1; 12; 14) is used, the degree of transmission (t) as a function of the wavelength (λ) of the electromagnetic radiation in accordance with the conditions for the optical resonance of the reflectors maxima (m) at various wavelength values, and wherein the degree of transmission (t) of the etalon (1; 12; 14) in a first wavelength range (δλ1) between two successive maxima (m), which extends over the arithmetic mean of the wavelengths in the case of the successive maxima (m), either continuously increases or decreases steadily.