A method for operating and / or for measurement of a micromechanical device and micromechanical device

摘要

A method is proposed for the operation and / or for measurement of a micromechanical device, wherein the micromechanical device, a relative to a substrate oscillation movable first seismic mass and a with respect to the substrate likewise oscillation movable second seismic mass, the micromechanical device a first drive means for the deflection of the first seismic mass and a second drive means for the deflection of the second seismic mass in each case parallel to one driving direction, and according to a first orientation, the micromechanical device, a third drive means for the deflection first seismic mass and a fourth drive device for deflection of the second seismic mass parallel to the driving direction and, in accordance with one of the first orientation opposite second orientation, the micromechanical device a first detection device for detection of the drive movement of the first seismic mass, the micromechanical device a second detection means for detecting the driving movement of the second seismic mass, for the operation and / or for measurement of the micromechanical device by means of the first detection device a first detection signal and by the second detection device a second detection signal is generated, whereby the first detection signal is evaluated separately from the second detection signal.