3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope

摘要

Microscopic interferometry is a powerful technique for the static and dynamic characterization of micromehanical devices. In this paper we emphasize its capabilities for 3D vibration mode shapes profiling of Al cantilever microbeams and Cr micromachined membranes. It is demonstrated that time-resolved measurements up to 800 kHz can be performed with a lateral resolution in the micrometer range and a vibration amplitude detection limit of 3-5 nm.