Method for manufacturing heating element for sensor for detecting particles, involves applying electrically conductive material on starter layer of substrate, where copper layer is galvanically deposited on starter layer

摘要

The method involves providing a substrate (12) and applying one electrically conductive material on a starter layer of the substrate, where a copper layer is galvanically deposited on the starter layer. A gold layer is applied on the copper layer. The copper layer is patterned photolithographically by using a photolithographic lift-off method. A photoresist is applied on the copper layer and is removed prior to application of the gold layer. The gold layer is applied by dipping into a gold-chloride solution. An independent claim is included for a sensor for detecting particles, particularly carbon black particles, which has measuring electrodes.