A method for assessing the quality of a wafer or single crystal ingot and method for controlling the quality of a single crystal ingot with the use of the same

摘要

Are provided a method for evaluating the quality of a wafer or a single crystal ingot and a method for controlling the quality of a single crystal ingot with the use of the same. The method for evaluating the quality of a wafer or a single crystal ingot can, according to another embodiment the passage of a cu (copper) -haze-review on a wafer or a disk of a single crystal ingot and cu-haze-scoring with respect to the result of the cu-haze-review comprise.