A method for realizing the dynamic equilibrium of the magnetic levitation molecular pump

摘要

The present invention relates to a method for realizing the dynamic equilibrium of the magnetic levitation molecular pump. After switching on the magnetic levitation molecular pump motor, the control module of the force control unbalance oscillation is started if under the control of the control module of the force control. Unbalance vibration due to the unbalance mass of the rotor does not exceed the maximum axial amplitude of the rotor during acceleration 1/2 of the protection gap, the synchronous vibration of the rotor is suppressed by the control module of the force control unbalance vibration, so that the rotor speed is fast can exceed its rigid critical speed, in which case the dynamic balance of the rotor of the magnetic levitation molecular pump can be realized at high speed by means of the coefficient of influence method. With the method according to the invention, the dynamic equilibrium of the rotor of the magnetic levitation molecular pump can be directly realized at a high speed, which has simple steps and high efficiency.