A method for realizing the dynamic equilibrium of the magnetic levitation molecular pump

摘要

A method of realizing the dynamic equilibrium of the magnetic levitation molecular pump, characterized in that the method comprises: after the magnetic levitation molecular pump motor (8) is energized, the motor accelerates, then the control module undergoes force-control unbalance oscillation Under the control of the magnetic levitation molecular pump controller (2), the displacement detector (18) collects the radial displacement signal of the magnetic levitation molecular pump rotor, and detects the radial amplitude of the rotor when under the magnetic levitation molecular pump controller (2) Control of the control module of the force-control imbalance vibration due to the imbalance mass of the rotor does not exceed the maximum axial amplitude of the rotor during acceleration 1/2 of the protection gap, the synchronous oscillation of the rotor from the control module of the force-control imbalance Vibration suppressed, so that the rotor speed practice its rigid critical speed If the maximum axial amplitude of the rotor exceeds 1/2 of the protection gap, then the traditional method of realizing the dynamic equilibrium is used here, first the dynamic equilibrium is carried out at a low speed, so that the maximum axial Amplitude of the rotor 1/2 of the protection gap does not exceed, while the rotor speed exceeds its rigid critical speed; If the rotor speed has exceeded its fixed critical speed then go to step ➁. The motor (8) continues to accelerate, detecting the displacement ...