Valve for e.g. blocking e.g. fluid for extreme UV projection exposure apparatus, has blocking element mechanically connected with magnet such that magnetic field is generated outside of valve housing with movement of blocking element

摘要

The valve has a housing with an inlet and a spacer. A blocking element is arranged in inner area of the valve housing and is moved between passage position and locking position. The supply and/or spacer of the valve are blocked with respect to the passage of fluid in the locking position. The blocking element is mechanically connected with a magnet that is arranged such that the magnetic field is generated outside of the valve housing with the movement of the blocking element. The magnet is arranged as permanent magnet. An independent claim is included for a projection exposure apparatus.