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Dual range high precision pressure sensor
Dual range high precision pressure sensor
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机译:双量程高精度压力传感器
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摘要
A high-precision pressure sensor with two or more pressure ranges is formed from multiple micro-electromechanical system (MEMS) pressure transducers mounted inside a housing and coupled to sense a pressurized fluid. The non-linear outputs of the MEMS pressure transducers are linearized by a corresponding number of processors, preferably DSPs, each processor being coupled to a corresponding MEMS pressure transducer and receiving the MEMS pressure transducer output signal there from. Each processor generates an applied pressure output signal, which is representative of a pressure applied to the MEMS pressure transducer, which is a linearized and digitized version of output signal from the MEMS pressure transducers. The data that is output from multiple processors, each of which outputs pressure data pertaining to a different range of pressures, is transmitted serially on a serial data bus.
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