Single crystal diamond substrates for synthesis of single crystal diamond material

摘要

A method of growing synthetic single crystal diamond material comprises: providing a single crystal diamond substrate; and growing synthetic single crystal diamond material on said single crystal diamond substrate, wherein said single crystal diamond substrate is formed of single crystal diamond material which is irradiated prior to growing synthetic single crystal diamond material thereon, and wherein the irradiation comprises irradiating the diamond material to a depth of 5µm or greater. The substrate may be formed from one of: single crystal synthetic HPHT material having a total equivalent isolated nitrogen concentration of 1-800 ppm; single crystal CVD diamond material have a total equivalent isolated nitrogen concentration of 0.005-100 ppm; or a natural diamond material having a total nitrogen concentration of 1-2000 ppm. The method may further comprise cooling the diamond material during the irradiation and annealing the diamond material. A composite substrate array for carrying out the method is also disclosed.