METHOD OF PRODUCING WHITE GAN POWDER, AND WHITE GAN POWDER

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a white GaN powder for a sputtering target that can form a GaN thin film having high purity and excellent crystallinity at low cost by a sputtering method to obtain the GaN thin film excellent in properties as a fluophor and communication element, and such a white GaN powder.;SOLUTION: This invention provides a method of producing a white GaN powder, the method comprising the step of heating Ga2O3 powder in a pressurized atmosphere furnace of ammonia at temperature lower than or equal to 900°C for 3-4 hours.;COPYRIGHT: (C)2016,JPO&INPIT