RETARDATION MEASUREMENT METHOD, RETARDATION MEASUREMENT DEVICE AND BIREFRINGENCE WAVELENGTH FEATURE MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To highly accurately measure retardation occurring in an arbitrary sample.;SOLUTION: A retardation measurement method is configured to use a compensator for each of a plurality of detection wavelengths to calculate first retardation not fulfilling one wavelength of a detection wavelength indicative of a phase difference occurring in a sample out of retardation occurring in the sample (S1); next, use a Berek compensator for each of the plurality of detection wavelengths to calculate second retardation on the basis of a thickness of a part where light of the Berek compensator transmits when intensity of light passing through an analyzer is minimized (S3); further calculate a birefringence wavelength property of the sample on the basis of a plurality of calculated second retardation (S7); and calculate retardation occurring in the sample corresponding to each of the plurality of detection wavelengths on the basis of a plurality of calculated first retardation and the calculated birefringence wavelength property of the sample (S11).;COPYRIGHT: (C)2015,JPO&INPIT