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Retardation measurement method, retardation measurement apparatus, birefringence wavelength characteristic measurement method

机译:延迟测量方法,延迟测量设备,双折射波长特性测量方法

摘要

PROBLEM TO BE SOLVED: To highly accurately measure retardation occurring in an arbitrary sample.SOLUTION: A retardation measurement method is configured to use a compensator for each of a plurality of detection wavelengths to calculate first retardation not fulfilling one wavelength of a detection wavelength indicative of a phase difference occurring in a sample out of retardation occurring in the sample (S1); next, use a Berek compensator for each of the plurality of detection wavelengths to calculate second retardation on the basis of a thickness of a part where light of the Berek compensator transmits when intensity of light passing through an analyzer is minimized (S3); further calculate a birefringence wavelength property of the sample on the basis of a plurality of calculated second retardation (S7); and calculate retardation occurring in the sample corresponding to each of the plurality of detection wavelengths on the basis of a plurality of calculated first retardation and the calculated birefringence wavelength property of the sample (S11).
机译:解决的问题:为了高度准确地测量任意样品中发生的延迟解决方案:延迟测量方法配置为对多个检测波长中的每一个使用补偿器来计算不满足指示以下波长的一个检测波长的第一延迟在样品中产生的相位差超过在样品中产生的延迟(S1);接下来,对多个检测波长的每一个使用贝雷克补偿器,以在通过分析仪的光的强度最小时,基于贝雷克补偿器的透射光的部分的厚度来计算第二延迟(S3);根据多个计算出的第二延迟量,进一步计算出样品的双折射波长特性(S7);然后,根据算出的多个第1相位差和算出的双折射波长特性,算出与多个检测波长分别对应的样本中产生的相位差(S11)。

著录项

  • 公开/公告号JP6203071B2

    专利类型

  • 公开/公告日2017-09-27

    原文格式PDF

  • 申请/专利权人 オリンパス株式会社;

    申请/专利号JP20140022736

  • 发明设计人 石渡 裕;

    申请日2014-02-07

  • 分类号G01N21/23;

  • 国家 JP

  • 入库时间 2022-08-21 13:56:10

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