NORMAL PRESSURE SINTERED SiC CERAMIC HAVING LOW ELECTRIC RESISTANCE

摘要

PROBLEM TO BE SOLVED: To provide a normal pressure sintered SiC ceramic dense and having low electric resistance.SOLUTION: Provided is a normal pressure sintered SiC ceramic using, as starting raw material, SiC powder in which the content of Al is 0.06 wt% or higher, and in which the content of Al in the surface of the SiC powder by Auger electron spectroscopy or X-ray photoelectron spectroscopic analysis is 0.1 atom% or lower and B or BC and C(carbon) below 3 wt% as a sintering assistant, and in which bulk density is 3.00 or higher, also, open porosity is 2% or lower and specific resistance at room temperature is 100 &OHgr; cm or lower.