MANUFACTURING METHOD OF THERMAL FLOW VELOCITY/RATE SENSOR, AND THERMAL FLOW VELOCITY/RATE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a thermal flow velocity/rate sensor which is reduced in size and improved in durability without deteriorating performance, the method in which a manufacturing technique is made simple and trouble of product adjustment and manufacturing costs can be reduced, and to provide the thermal flow velocity/rate sensor.SOLUTION: In the method, a flow velocity detection part is formed by using general-purpose electronic components, a substrate manufacturing device and an automatic mounting machine line, and mounting a heater element and a temperature-measuring element on both sides of a mounting position of a substrate part. Further, a flow rate detecting support part 42 and a temperature measuring support part 43, each of which has a slender shape and integrally extends from a substrate main part 41b, are formed so as to be spaced from each other on both sides at one end side of a single substrate 41. A flow rate detection part 40 and a temperature measuring part 44 are respectively formed at the tip end parts of the support parts, thereby forming a structure in which a space is provided between the flow rate detection part 40 and the temperature measuring part 44 and the plate-like substrate main part 41b is provided.