NON-EVAPORATION TYPE GETTER MATERIAL, NON-EVAPORATION TYPE GETTER MODULE, AND NON-EVAPORATION TYPE GETTER PUMP

摘要

PROBLEM TO BE SOLVED: To provide a non-evaporation type getter material having an improved gas adsorption rate, and a non-evaporation type getter pump having an improved exhaust rate with a reduced manufacturing cost and a reduced repair cost.SOLUTION: A non-evaporation type getter material includes network structure. A non-evaporation type getter module includes the non-evaporation type getter material. A non-evaporation type getter pump includes the non-evaporation type getter material or the non-evaporation type getter module.