HIGHLY CLEAN ROOM SYSTEM, HIGHLY CLEAN WORK ROOM SYSTEM, HIGHLY CLEAN GAS SUPPLY SYSTEM, AND METHOD FOR CONTROLLING CLEANNESS OF THE HIGHLY CLEAN ROOM SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a highly clean room system capable of attaining high cleanness and complying with an air exhaustion demand or rule by the law etc.SOLUTION: A highly clean room system is provided with a FFU (Fan Filter Unit) with collection efficiency provided with an air outlet so that a gas is fed to the inside of a room with air quantity F, and an opening for discharging the gas to the outside of a living space etc., on a wall of the room. The highly clean room system is configured such that when there are a plurality of air exhaustion demands or rules, the air quantity Fof air introduced from a space outside the room is set to F=max{f), when air quantities of the air exhaustion demands or rules are defined as f(i=1, 2, 3, ...), and the air is introduced into the living space etc., from the outside space with the air quantity Fthrough a filter having collection efficiency . Further, attainment cleanness of the living space etc., is set to n=S/(F+F)+N(1-)F/(F+F) when dust particulate density of the outside space is defined as N, an internal area of the room is defined as S, and a desorption rate of dust particulates per unit area/unit time of the internal surface is defined as .