HIGHLY CLEAN ROOM SYSTEM, HIGHLY CLEAN WORK ROOM SYSTEM, HIGHLY CLEAN GAS SUPPLY SYSTEM, AND METHOD FOR CONTROLLING CLEANNESS OF THE HIGHLY CLEAN ROOM SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a highly clean room system capable of attaining high cleanness and complying with an air exhaustion demand or rule by the law etc.;SOLUTION: A highly clean room system has a living space etc. as a closed space in the inside of a room, and is provided with a fan filter unit with collection efficiency of γ provided with an air outlet so that a gas is fed into the room with air quantity F₁, and is configured so that all the gas flowing out from the air outlet to the inside of the living space etc., flows back to a suction port of the fan filter unit, and an opening for discharging the gas to outside the living space etc., is formed on a wall of the room. When there are a plurality of exhaustion demands or rules, the air quantity F₂ of air introduced from a space outside the room is set to F₂=max{f_i) when air quantities of the exhaustion demands or rules are defined as f_i (i=1, 2, 3, ...), and the air is introduced into the living space etc., from the outside space with the air quantity F₂ through a dust-proof filter having collection efficiency γ_p.;COPYRIGHT: (C)2015,JPO&INPIT