SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT INCLUDING THE SAME, AND SUBSTRATE DAMAGE DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To detect damage of the whole peripheral edge of a substrate with a small number of sensors.SOLUTION: A substrate transfer robot 4 includes an imaging section 452 slidably movable in a width direction at a tip of a slide drive section 41 for sliding and moving hands 401 and 402. The imaging section 452 includes a line sensor capable of switching the direction by 90°. When the hand 401 mounted with a substrate 5 thereon is slid and moved, the imaging section 452 is set to both ends in a slide range so as to perform a photographing operation during a slide period of the hand 401 and capture images of both sides in a width direction of the substrate 5. An end on a front side and an end on a rear side of the substrate 5 are set to the position of the imaging section 452, an imaging operation is performed while sliding the imaging section 452 in the state of switching the direction of the line sensor by 90°, and images in side sections on the front side and on the rear side of the substrate 5 are captured. Damage is detected by pattern matching for every photographed image of the four side sections in the substrate 5.