THREE-DIMENSIONAL MAGNETIC FIELD MEASURING APPARATUS AND THREE-DIMENSIONAL MAGNETIC FIELD MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional magnetic field measuring apparatus and a three-dimensional magnetic field measuring method capable of solving a problem of cross-axis sensitivity that constitutes a serious obstacle for realizing three-dimensional magnetic field measurement.;SOLUTION: A three-dimensional magnetic field measuring apparatus 10 of the present invention is configured so that a plurality of magnetic detection elements 3 is arranged around a magnetic body 2 provided on a semiconductor IC substrate 1 and having a magnetic amplification function. A signal processing unit 12 generates output signals Vsig,x, Vsig,y, and Vsig,z that are three-dimensional vector signals corresponding to three-dimensional magnetic vectors Hx, Hy, and Hz input to the magnetic body 2, respectively. A correction-coefficient storage unit 14 stores a correction coefficient for correcting cross-axis sensitivity generated in magnetic-electric conversion performed by the signal processing unit 12 for generating the three-dimensional output signals Vsig,x, Vsig,y, and Vsig,z. A magnetic-field-component calculation unit 15 calculates the three-dimensional output signals Vsig,x, Vsig,y, and Vsig,z based on the correction coefficient stored in the correction-coefficient storage unit 14.;COPYRIGHT: (C)2015,JPO&INPIT