POLARIZATION TREATMENT METHOD OF PIEZOELECTRIC LAYER, PIEZOELECTRIC DEVICE, ELECTRONIC APPARATUS AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide a polarization treatment method of a piezoelectric layer capable of increasing an amount of displacement of the piezoelectric layer.;SOLUTION: A polarization treatment method of a piezoelectric layer includes: a piezoelectric layer preparation step of preparing a piezoelectric layer 10, a first electrode layer 11 provided at one side of the piezoelectric layer 10 and a second electrode layer 12 provided at the other side of the piezoelectric layer 10; a hysteresis characteristics measurement step of applying a voltage between the first electrode layer 11 and the second electrode layer 12 and measuring hysteresis characteristics of the piezoelectric layer 10; and a positive electric field polarization treatment step of applying the voltage between the first electrode layer 11 and the second electrode layer 12 such that an electric field becomes a positive electric field and performing polarization treatment of the piezoelectric layer 10 in the case where the hysteresis characteristics are closer to a positive electric field side when setting an electric field of which a direction generated by the voltage applied is a direction from the first electrode layer 11 toward the second electrode layer 12 to the positive electric field and an electric field of which a direction is a direction from the second electrode layer 12 toward the first electrode layer 11 to a negative electric field in measurement results of the hysteresis characteristics of the piezoelectric layer 10.;COPYRIGHT: (C)2015,JPO&INPIT