LAMINATED BODY, ELECTRONIC DEVICE EQUIPPED WITH THE LAMINATED BODY, PIEZOELECTRIC DEVICE, PIEZOELECTRIC MODULE EQUIPPED WITH THE PIEZOELECTRIC DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC APPARATUS AND THE LAMINATED BODY

摘要

PROBLEM TO BE SOLVED: To provide a laminated body for preventing a bonding material from sticking out from a bonding surface in a laminated structure made by superimposing and bonding a plurality of substrates, an electronic device equipped with the laminated body, a piezoelectric device, a piezoelectric module equipped with the piezoelectric deice, and a manufacturing method of an electronic apparatus and the laminated body.;SOLUTION: A pressure sensor 1 includes a pressure sensitive element layer 10, a diaphragm layer 20, and a base layer 30 which are laminated and bonded by a bonding material 40. Groove portions 102a and 102b are formed in a frame portion 108 of the pressure sensitive element layer 10. A groove portion 208 is formed in a frame portion 206 on the other main surface side of the diaphragm layer 20, and a groove portion 306 is formed in a frame portion 304 on one main surface side of the base layer 30. The groove portion 208 is disposed by being shifted so as not to oppose to the groove portion 102a, and the groove portion 306 is disposed by being shifted so as not to oppose to the groove portion 102b.;COPYRIGHT: (C)2013,JPO&INPIT