Magnetorheological fluid for ultra-smooth polishing

摘要

Magnetorheological ultra-superimposition of a substrate surface comprising an aqueous carrier solvent, a first amount of magnetic particles having an average particle size of 1 μm-2 μm, and a second amount of abrasive particles having an average particle size of 1 nm-15 nm Magnetorheological fluid for use in smooth polishing. The fluid may further include a chemical stabilizer. Preferably, the size of the magnetic particles is 2-3 orders of magnitude larger than the size of the abrasive particles. Preferably, the magnetic particles are spherical and contain carbonyl iron. Preferably, the abrasive particles are selected from the group consisting of aluminum oxide, zirconium oxide, cerium oxide, silica, boron carbide, silicon carbide, natural diamond, synthetic diamond, and combinations thereof. [Selection figure] None