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COATING FILM IMAGE ANALYSIS DEVICE AND COATING FILM ANALYSIS METHOD

机译:镀膜图像分析装置及镀膜分析方法

摘要

PROBLEM TO BE SOLVED: To provide a coating film analysis device and a coating film analysis method that can accurately analyze with a simple configuration as to each layer formed by having a plurality of layers laminated.SOLUTION: The present invention relates a coating film analysis device analyzing a coating film (9) made up of a plurality of layer, and a light source (1); a measurement probe (16) that irradiates the coating film with irradiation light and receives reflection light from the coating film; a reference light generation unit (14) that generates reference light from light source light; an optical measurement unit (54) that measures a tomographic structure as an optical distance on the basis of interference light with th reflection light and th reference light; and image processing unit (56) that outputs a tomographic structure as a tomographic image by converting the measured tomographic structure into a mechanical distance on the basis of a refractive index having the tomographic structure preliminarily measured.
机译:解决的问题:提供一种涂膜分析装置和涂膜分析方法,该涂膜分析装置和涂膜分析方法能够以简单的构造对通过层叠多层而形成的各层进行准确的分析。解决方案:涂膜分析装置分析由多层构成的涂膜(9)和光源(1);测量探头(16),其用照射光照射涂膜并从涂膜接收反射光。参考光产生单元(14),其从光源光产生参考光;光学测量单元(54),基于具有反射光和参考光的干涉光,将断层摄影结构测量为光学距离。图像处理单元(56),其基于具有预先测量的断层结构的折射率,通过将所测量的断层结构转换为机械距离来输出断层结构作为断层图像。

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