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COATING FILM IMAGE ANALYSIS DEVICE AND COATING FILM ANALYSIS METHOD
COATING FILM IMAGE ANALYSIS DEVICE AND COATING FILM ANALYSIS METHOD
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机译:镀膜图像分析装置及镀膜分析方法
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摘要
PROBLEM TO BE SOLVED: To provide a coating film analysis device and a coating film analysis method that can accurately analyze with a simple configuration as to each layer formed by having a plurality of layers laminated.SOLUTION: The present invention relates a coating film analysis device analyzing a coating film (9) made up of a plurality of layer, and a light source (1); a measurement probe (16) that irradiates the coating film with irradiation light and receives reflection light from the coating film; a reference light generation unit (14) that generates reference light from light source light; an optical measurement unit (54) that measures a tomographic structure as an optical distance on the basis of interference light with th reflection light and th reference light; and image processing unit (56) that outputs a tomographic structure as a tomographic image by converting the measured tomographic structure into a mechanical distance on the basis of a refractive index having the tomographic structure preliminarily measured.
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