METHODS FOR PRODUCING Cu-Ga-BASED ALLOY POWDER HAVING LOW OXYGEN CONTENT AND SPUTTERING TARGET MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide methods for producing low oxygen Cu-Ga-based alloy powder and a sputtering target material each for producing a light absorption thin film layer of a solar cell.;SOLUTION: There is provided the method for producing a Cu-Ga-based alloy powder for obtaining the Cu-Ga-based alloy powder having an oxygen content of 100 ppm or less by atomization of a molten metal of the Cu-Ga-based alloy containing, by atom%, Ga of 25% or more and less than 40% and the balance Cu with inevitable impurities by N₂ gas. There is also provided the method for producing a Cu-Ga-based sputtering target material using a raw material powder of the Cu-Ga-based alloy powder.;COPYRIGHT: (C)2015,JPO&INPIT