首页>
外国专利>
TANTALUM OXO-ALKOXO COMPLEX, METHOD OF PRODUCING THE SAME, AND METHOD OF MAKING TANTALUM OXIDE FILM
TANTALUM OXO-ALKOXO COMPLEX, METHOD OF PRODUCING THE SAME, AND METHOD OF MAKING TANTALUM OXIDE FILM
展开▼
机译:氧化钽-氧化铝络合物,其制备方法和氧化钽膜的制备方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a tantalum oxo-alkoxo complex useful as material for film making used in preparing a tantalum oxide film and a method of producing the same.SOLUTION: A novel tantalum oxo-alkoxo complex represented by chemical formula (1) is produced, and the tantalum oxo-alkoxo complex (1) is further mixed with organic solvent to prepare material solution for film making, and the material solution for film making is used to prepare a tantalum oxide film.
展开▼