CF4 GAS CONCENTRATION MEASUREMENT METHOD AND CF4 GAS CONCENTRATION MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas concentration measurement method and a concentration measurement device that enable concentration of CF₄ gas in test gas including CF₄ and C₂F₆ to be easily detected with high reliability.;SOLUTION: A gas concentration of CF₄ gas in test gas including CF₄ gas and C₂F₆ gas is measured by the procedures of: (1) acquiring gas concentration of C₂F₆ gas on the basis of absorbance by the C₂F₆ gas of an infrared ray in a second wavelength region in which a center wavelength is 9035±50 nm; (2) acquiring an output component regarding the C₂F₆ gas in a gas detection output in accordance with an amount of the infrared ray in a first wavelength region in which the center wavelength is 7850±50 nm on the basis of the C₂F₆ gas concentration, and acquiring an output component regarding the CF₄ gas in the gas detection output; and (3) acquiring gas concentration of the CF₄ gas on the basis of a correction output having the output component regarding the CF₄ gas corrected by a correction factor corresponding to the C₂F₆ gas concentration.;COPYRIGHT: (C)2015,JPO&INPIT