CF4 gas concentration measurement method and CF4 gas concentration measurement apparatus

摘要

PROBLEM TO BE SOLVED: To provide a gas concentration measurement method and a concentration measurement device that enable concentration of CFgas in test gas including CFand CFto be easily detected with high reliability.SOLUTION: A gas concentration of CFgas in test gas including CFgas and CFgas is measured by the procedures of: (1) acquiring gas concentration of CFgas on the basis of absorbance by the CFgas of an infrared ray in a second wavelength region in which a center wavelength is 9035±50 nm; (2) acquiring an output component regarding the CFgas in a gas detection output in accordance with an amount of the infrared ray in a first wavelength region in which the center wavelength is 7850±50 nm on the basis of the CFgas concentration, and acquiring an output component regarding the CFgas in the gas detection output; and (3) acquiring gas concentration of the CFgas on the basis of a correction output having the output component regarding the CFgas corrected by a correction factor corresponding to the CFgas concentration.