semi-transparent waveguide electromagnetic plasma light source is provided with a workpiece 1 made of quartz, sealed inside a sealed cavity The body 2 outer diameter 8mm, is drawn tube with an inner diameter of 4mm is formed. Microwave-excited plasma material is sealed inside the sealed body. The outer end portion 4, the end plate 5, protruding approximately 10.5mm. The total length of the bulb is approximately 20.5mm. tube 71 a cavity is formed, continues as an antenna sheath 72 rearwardly from the inner end of the bulb cavity. The end plate 5 having a thickness of 2mm circular, the central bore in it, the envelope 2 is sealed. It is arranged similar plate 6 away 10mm, a slight gap of 2mm exists between the inner end of the seal body inner plate 6 about. Antenna sheath 72 is fused to the inner plate 6, with the plates inside the opening portion 73, the antenna has become insertable into the sheath. In both plates with a diameter of 34mm, it is sealed in a quartz drawn tube 7. Quartz withdrawal pipe 7 has an outer diameter of 38mm, has a thickness of 2mm. Outer end 10 of the outer tube 7 is made flush with the outer end plate 5, an inner end portion of the outer tube extending 17.5mm from the side surface of the inner plate 6 as a skirt portion 9 backward. This structure has a space 74 therein, comprises a skirt-shaped recess 13 extending into the antenna sheath 72. The skirt-like recess block 14 is accommodated comprising alumina. Its outer diameter is 33.9mm, it is 17.7mm thick. Right circular cylindrical block 14 has a central bore 15 having a diameter of 2mm. Antenna 18 is housed in the central bore 15, with a length of only extends to the antenna sheath 72.BACKGROUND 2
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