ELECTRODEPOSITION METAL PEELING DEVICE AND METHOD FOR PEELING ELECTRODEPOSITION METAL

摘要

PROBLEM TO BE SOLVED: To suppress the damage of a cathode in a process of peeling the cathode from an electrodeposition metal layer.;SOLUTION: The electrodeposition metal peeling device 100 comprises: a transport apparatus 16; and a chiseling apparatus 110 separated from the right and left both edge parts of an electrodeposition metal layer K to the head thereof. The chiseling apparatus 110 comprises: the main chisu blade 200; a pair of ultrasonic chisu blades 210A, 210B arranged on the right and left both sides of the main chisu blade 200; an elevation driving mechanism 220 of elevating the main chisu blade 200 and the ultrasonic chisu blades 210A, 210B to a vertical direction (Z direction); and an excitation apparatus 230. The excitation apparatus 230 comprises: an ultrasonic control part 240; and a pair of ultrasonic oscillators 250A, 250B. The ultrasonic chisu blades 210A, 210B insert the tips 212A, 212B into a space between a cathode 12 and the electrodeposition metal layer K while ultrasonic waves are inputted by the ultrasonic oscillators 250A, 250B to form a gap between the cathode 12 and the electrodeposition metal layer K.;COPYRIGHT: (C)2015,JPO&INPIT