LASER SCRIBE DEVICE AND LASER SCRIBE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser scribe device and a laser scribe processing method in which scribe processing can be applied to each thin film of plural layers without affecting on a lower part layer and cost reduction can be achieved.;SOLUTION: The laser scribe device includes a laser light source which oscillates a laser beam, an optical unit which condenses the laser beam oscillated by the laser light source and irradiates each thin film with the light, and optical unit control means 16a which controls to change the imaging position by condensing of the optical unit corresponding to the height position of each layer. The optical unit control means 16a includes imaging.beam waist position switching control part 16aa which switches the position of the laser beam corresponding to the height of a film to the imaging position or a beam waist position, corresponding to the thin film to which scribe processing is to be applied.;COPYRIGHT: (C)2015,JPO&INPIT