Single crystal CVD synthetic diamond material .

摘要

A single crystal CVD synthetic diamond material has a total concentration of nitrogen as grown above 5ppm, and a uniform distribution of the defect, the uniform distribution of defects, the following features of defined by one or two or more, the feature is as follows, namely, (i) the total nitrogen concentration, secondary ion mass over an area of ??more than 50 50?m using the following analysis region 10?m Once mapped by analysis (SIMS), the mean having a point-to-point variations in less than 30% of the total nitrogen concentration value, or it is mapped by SIMS over an area of ??more than 200 200?m by using the following analysis region 60?m that the, to have a point-to-point variations in less than 30% of the average total nitrogen concentration value, measured using and (ii) the nitrogen vacancy defects remain grown (NV) concentration 77K UV visible absorption measurement The is 50ppb or Te, nitrogen vacancy defects, the area of ??more than 50 50?m data interval is excited, and less than 10?m using a 514nm laser excitation source of 10?m or less spot size at room temperature using a 50mW continuous wave laser over and is mapped, uniformly distributed in synthetic single crystal CVD diamond material so that low-point-to-point variations occur, of nitrogen vacancies photoluminescence peak of the high photoluminescence intensity of region and the low photoluminescence intensity of area intensity area ratio, 575nm photoluminescence peak (NV ⁰ ) or 637nm photoluminescence peak (NV ^-.... ) for Kano any two be less than times, the variation of (iii) Raman intensity, using a 50mW continuous wave laser is excited using 514nm laser excitation source of 10?m or less spot size at room temperature (as a result, the Raman peak at 552.4nm Raman occurs), and the mapped over an area of ??more than 50 50?m data interval of less than 10?m, it is intended as a low point-to-point variations occur, the low Raman intensity of the region and the high Raman intensity regions that the ratio of the peak area is less than 1.25, is 50ppb or more measured using and (iv) the nitrogen vacancy defects remain grown (NV) concentration 77K UV visible absorption measurement, 50mW when excited using 514nm laser excitation source below the spot size 10?m at 77K using a continuous wave laser, a 120-fold of the Raman intensity at 552.4nm NV. ^0. 200 times greater than NV Raman intensity at intensity and / or 552.4nm at 575nm corresponding to. ^-. The intensity at 637nm corresponding to the given, (v) a single substitutional nitrogen defects (N. _S. ) Concentration is is 5ppm or more, a single substitutional nitrogen defects, 1344cm . ^-1. 0.5mm along with the use of the infrared absorption features. ^2. Of by sampling a larger area than the area, to be uniformly distributed in the synthetic single crystal CVD diamond material as the variation is less than 80% derived by dividing the standard deviation by the average value, (vi ) the variation of the red luminescence intensity obtained by the standard deviation divided by the average value is less than 15%, (vii) the average standard deviation of the neutral single substitutional nitrogen concentration is less than 80%, (viii) There the intensity of color was measured using a histogram from the microscope image including the average gray value of greater than 50, color intensity, the variation of gray less than 40% characterized by the gray value standard deviation divided by the gray value average Single crystal CVD synthetic diamond material which is characterized in that as is it is that it is uniform in the single crystal CVD synthetic diamond material. .. [Selection Figure Figure 3.