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with a build-down method flow monitor flow control device, and a monitor with a flow control method using the same.
with a build-down method flow monitor flow control device, and a monitor with a flow control method using the same.
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机译:组装方法的流量监测器流量控制装置以及使用该监测器的流量控制方法的监测器。
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摘要
To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost.
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