Production method of temperature control devices and temperature control equipment

摘要

PROBLEM TO BE SOLVED: To provide a temperature control unit or the like, capable of reducing manufacturing time as compared with conventional art, and capable of improving a uniformity of a temperature distribution of a metal plate while suppressing distortion, separation between interfaces, and crack when different materials are bonded.;SOLUTION: A temperature control unit 100 of the present invention includes: a base plate 41 comprising aluminum or an aluminum alloy; a body plate 3 having a passage at an inside thereof and formed by accelerating powder of metal or an alloy, which is different from aluminum or an aluminum alloy, together with gas and spraying the powder kept in a solid phase state toward the base plate to be deposited; and an outer cover plate 42 mounting an object to be temperature controlled thereon, formed of a same material as the base plate, and covering the body plate.;COPYRIGHT: (C)2013,JPO&INPIT