optical anisotropy parameter measurement device, measuring method and the measuring program

摘要

PROBLEM TO BE SOLVED: To provide a measuring device that can be reduced in size as a whole by employing a system of perpendicularly irradiating a sample with incident light and that can measure the direction of an optical axis and the degree of anisotropy in an extremely short time.;SOLUTION: The measuring device includes a measurement optical system 4 for irradiating a sample 3 with incident light in a perpendicular direction from a laser 6 and guiding the reflected light reflected in a perpendicular direction to a light-receiving element 9 via a half mirror 7, in which a polarizer P is disposed between the laser 6 and the half mirror 7 and an analyzer A is disposed between the half mirror 7 and the light-receiving element 9. Further, a half-wave plate 12 and a quarter-wave plate 13 are disposed between the half mirror 7 and the sample 3. The half-wave plate rotates linearly polarized light generated by the polarizer P; and the quarter-wave plate is driven to synchronously rotate in such a manner that the direction of a slow axis is rotated from an initial position, which is shifted by ±δ (where δ≠nπ/4 and n is an integer) from the slow axis of the half-wave plate 12, to a position giving twice the rotation angle with respect to the half-wave plate 12.;COPYRIGHT: (C)2013,JPO&INPIT