DEVICE FOR MEASURING OPTICAL ANISOTROPY PARAMETER, METHOD FOR MEASURING OPTICAL ANISOTROPY PARAMETER, AND PROGRAM FOR MEASURING OPTICAL ANISOTROPY PARAMETER

摘要

PROBLEM TO BE SOLVED: To provide a device with which an optical anisotropy parameter specifying a complex refractive index can be precisely measured even for a thin film sample having a difference as extremely small as 0.01 or less between an ordinary light refractive index and an extraordinary light refractive index.SOLUTION: Under the condition of crossed Nicols in a polarizer set in a P direction and an analyzer set in an S direction, an intensity A11 of reflected light from a sample is measured while rotating a wave plate disposed between a measurement point and the analyzer. Under the condition of incomplete crossed Nicols in the polarizer set in the P+ direction and the analyzer set in the S direction, an intensity B11 of the reflected light is measured while rotating the wave plate. Under the condition of incomplete crossed Nicols in the polarizer set in the P- direction and the analyzer set in the S direction, an intensity B12 of the reflected light is measured while rotating the wave plate. Under the condition of crossed Nicols in the polarizer set in the S direction and the analyzer set in the P direction, an intensity C11 of the reflected light is measured while rotating a wave plate. Factors pp, ps, sp and pp, ps, sp of complex reflectance ratios are calculated based on the above intensities of light.