Multi-wire electric discharge machining apparatus and a multi-wire electric discharge machining method and method of manufacturing a silicon carbide plate.

摘要

PROBLEM TO BE SOLVED: To efficiently cut a silicon carbide thin plate by suppressing resonation of a cut wire part in a multi-wire electrical discharge machining device.;SOLUTION: When generation of discharge is stopped while discharge machining is performed, conduction is stopped when an accumulated time ST which is a total time of a time for which discharge counted from re-start of conduction of high-frequency pulse power is detected and a time for which discharge is not detected becomes shorter than a natural period t_s of a period of vibration of the cut wire part for a first detuning time Δt_s1, then conduction is kept stopped for a temporal stop time Δt_p, and when a time elapsed from re-start of conduction of the high-frequency pulse power becomes longer than the natural period t_s of the period of vibration of the cut wire part for a second detuning time Δt_s2, conduction of the high-frequency pulse power is re-started.;COPYRIGHT: (C)2012,JPO&INPIT