Optical system and the cylindrical inner circumferential surface inspection apparatus for a cylindrical inner circumferential surface inspection.

摘要

PROBLEM TO BE SOLVED: To perform imaging all across a cylindrical inner surface robustly with respect to displacement of positioning of an optical system in the cylinder of a detector.;SOLUTION: A cylindrical inner surface detection optical system includes: a light source 16; a beam splitter 20 for reflecting illumination light from the light source 16 in the cylinder so that it becomes coaxial light of the cylinder; a diaphragm part 26 for restricting aperture of the illumination light reflected by the beam splitter 20; a convex lens part 28A for collecting the illumination light restricted by the diaphragm part 26; a reflection mirror 28B with a convex surface for reflecting the illumination light collected by the convex lens part 28A across the cylindrical inner surface and reflecting the reflection light from the inner surface on an imaging device 24 for imaging the inside the cylinder; and an objective convex lens part 28C which is provided opposite to the inner surface and illuminates the illumination light reflected by the reflection mirror 28B on the inner surface, and collecting and receiving the reflection light from the inner surface.;COPYRIGHT: (C)2013,JPO&INPIT